Journal of Vacuum Science and Technology
ACADEMIC JOURNAL
Journal of Vacuum Science and Technology A; Journal of Vacuum Science and Technology B; J. Vac. Sci. Technol.; J Vac Sci Technol; Journal of Vacuum Science & Technology B; Journal of Vacuum Science & Technology A; Journal of Vacuum Science & Technology; Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films; Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena; Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures; Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films; Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena; Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures; J. Vac. Sci. Technol. A; J Vac Sci Technol A; J. Vac. Sci. Technol. B; J Vac Sci Technol B; Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena; Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena; Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures; Journal of Vacuum Science & Technology A Vacuum Surfaces and Films; Journal of Vacuum Science and Technology A Vacuum Surfaces and Films; Journal of Vacuum Science and Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena; Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena; Journal of Vacuum Science Technology B: Microelectronics & Nanometer Structures; Journal of Vacuum Science & Technology A: Vacuum, Surfaces, & Films; Journal of Vacuum Science & Technology A Vacuum Surfaces & Films; Journal of Vacuum Science & Technology B: Microelectronics Processing & Phenomena; Journal of Vacuum Science & Technology B: Microelectronics & Nanometer Structures; Journal of Vacuum Science & Technology B, Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena; Journal of Vacuum Science & Technology B: Microelectronics & Nanometer Structures Processing, Measurement, & Phenomena; Journal of Vacuum Science & Technology A: Vacuum, Surfaces & Films; Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B, by the American Institute of Physics on behalf of the American Vacuum Society. It was established in 1964 and the editor-in-chief is Eray Aydil (University of Minnesota).